OUTFLOW SHUTOFF DEVICE FOR CLEAN AIR IN CLEAN ROOM

PROBLEM TO BE SOLVED: To solve the following problem: when opening an opening part of a large size to a partition of a clean room, a lot of clean air in the clean room flows out to the outside. SOLUTION: A pressure inside the clean room is set to be in a higher state than an air pressure outside the...

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Hauptverfasser:	KOBAYASHI KIICHI, SAWASHIMA KENICHI, IMON AKIHIRO, KOBAYASHI TETSUYA
Format:	Patent
Sprache:	eng
Schlagworte:	AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING BLASTING HEATING LIGHTING MECHANICAL ENGINEERING RANGES VENTILATING WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To solve the following problem: when opening an opening part of a large size to a partition of a clean room, a lot of clean air in the clean room flows out to the outside. SOLUTION: A pressure inside the clean room is set to be in a higher state than an air pressure outside the clean room. The partition of a boundary between the clean room and the outside is formed with the opening part. Pressurized air is supplied toward a direction shutting off the opening part from a spout provided on one side of the opening part. The supplied pressurized air is sucked by a suction port provided on the other side of the opening part. The air sucked by the suction port is made to pass a dust collector removing chemical substance or dust inside the air, and is newly circularly supplied from the spout provided on one side of the opening part. COPYRIGHT: (C)2007,JPO&INPIT