TRANSFER MASTER DISK AND MANUFACTURING TECHNOLOGY THEREFOR

PROBLEM TO BE SOLVED: To provide a technology for manufacturing a transfer master disk which enables highly accurate transfer to be performed even when higher definition of a transfer pattern is attained. SOLUTION: The die (40) of a transfer master disk substrate is manufactured by sequentially performing a step (A) of applying a resist 31 onto a flat substrate 20 and performing exposure and development to form a resist pattern R1, a step (B) of improving the line width uniformity of the resist pattern R1, and a step (C) of etching the flat substrate 20 by using a resist pattern R2 after the step (B) as a mask and forming a reversed pattern P2 complementary to a surface uneven patten P1 having an etched part as a recess 21. COPYRIGHT: (C)2007,JPO&INPIT