MANUFACTURING METHOD OF THIN FILM DEPOSITION SUBSTRATE, AND DISK FOR RECORDING AND PLAYBACK USING THE SAME

PROBLEM TO BE SOLVED: To provide the manufacturing method of a thin film deposition substrate which is excellent in high density recording property and surface flatness, in a method of depositing thin film of a single layer or a multi-layer, and a disk for recording and playback. SOLUTION: The metho...

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Bibliographische Detailangaben
Hauptverfasser: UCHIYAMA HIROICHI, KITA HIROYUKI, OKAMOTO TADASHI
Format: Patent
Sprache:eng
Schlagworte:
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