FILM THICKNESS IRREGULARITY DETECTION METHOD

PROBLEM TO BE SOLVED: To provide a method for efficiently detecting the coating irregularity of a transparent photosensitive resin film applied to a large-area base. SOLUTION: Irradiation light X is applied to the surface of the base 1 obliquely, a convex lens 2 is arranged on the optical path of re...

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Bibliographische Detailangaben
Hauptverfasser: HANEHIRO KENICHI, MIHASHI MITSUSACHI
Format: Patent
Sprache:eng
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