FILM THICKNESS IRREGULARITY DETECTION METHOD

PROBLEM TO BE SOLVED: To provide a method for efficiently detecting the coating irregularity of a transparent photosensitive resin film applied to a large-area base. SOLUTION: Irradiation light X is applied to the surface of the base 1 obliquely, a convex lens 2 is arranged on the optical path of reflection light emitted in an oblique direction, and an image 3 of the base 1 is formed by the operation of the convex lens 2. An optical axis 2a of the convex lens 2 is inclined to a normal line 1a of the surface of the base 1, and the image 3 is also formed at a position inclined to the normal line 1a on the surface of the base 1. Then, the intensity of reflection light is measured for each region corresponding to pixels by photographing the image 3 by a camera. Then, coating irregularities are detected from the intensity of the measured reflection light. COPYRIGHT: (C)2007,JPO&INPIT