LASER BEAM MACHINING APPARATUS
PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus capable of machining a workpiece in vacuum or in a desired gaseous atmosphere as well as improving positional accuracy for irradiation in an X and a Y direction. SOLUTION: The laser beam machining apparatus is equipped with a scanning...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus capable of machining a workpiece in vacuum or in a desired gaseous atmosphere as well as improving positional accuracy for irradiation in an X and a Y direction. SOLUTION: The laser beam machining apparatus is equipped with a scanning means 22 for optically scanning a laser beam in the X and Y directions respectively, a lens barrel 25 for guiding the laser beam outgoing from this scanning means, and an airtight chamber 31 to which this lens barrel is integrally connected, wherein a condensing lens 26 is arranged in the lens barrel in a sealed state. COPYRIGHT: (C)2007,JPO&INPIT |
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