METHOD AND DEVICE FOR PRODUCING CLUSTER FILM

PROBLEM TO BE SOLVED: To increase the production amount of the clusters by increasing the efficiency in the generation of material vapor from the irradiation face of a laser beam and the generation of inert gas shock waves, and to. SOLUTION: In a cluster formation space filled with inert gas, a soli...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	IWATA YASUTSUGU, MUTO MAKIKO
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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