METHOD AND DEVICE FOR PRODUCING CLUSTER FILM

PROBLEM TO BE SOLVED: To increase the production amount of the clusters by increasing the efficiency in the generation of material vapor from the irradiation face of a laser beam and the generation of inert gas shock waves, and to. SOLUTION: In a cluster formation space filled with inert gas, a solid target 1 as the material is irradiated with pulse laser beams 2 to allow the evaporated and expanded material vapor to generate the shock waves of the inert gas, and the shock waves are reflected against the wall of a vessel forming the cluster formation space so as to surround the expanded and progressed material vapor, thus the coupling between the material molecules or atoms occurs to form a cluster group, and the formed cluster group is made to flow out from the vessel window of the cluster formation vessel and is scattered over a prescribed substrate, so as to form a cluster film. At this time, the focusing point 11 of each laser beam 2 is set to a position deviated from the target 1, or the target 1 is arranged at a position deviated from the focusing point of each laser beam 2, and further, the distribution of the irradiation quantity in each irradiation face of the pulse laser beam is regulated. COPYRIGHT: (C)2007,JPO&INPIT