NONCONTACT SUBSTRATE CONVEYING DEVICE

PROBLEM TO BE SOLVED: To stably convey a substrate floating by air. SOLUTION: A number of air blowout parts 2 are formed in a base 1 at mounting intervals L, and an upper face part 7 of each air blowout part 2 is in a shape of curved face corresponding to a projection part 8 of the substrate G which is deformed in a wave form curve by air blown out of each air blowout part 2, so as to prevent an leading edge part of the substrate G in a conveyance direction from hanging low. A constant floating distance δ1 between the substrate G and the upper face part 7 is maintained to keep a floating state of the substrate G constant and thereby stably convey the substrate G with a state where the possibility of contact of the substrate G with each corner part 7a of the air blowout part 8 is eliminated. COPYRIGHT: (C)2007,JPO&INPIT