PRESSURE DETECTOR OF GAS

PROBLEM TO BE SOLVED: To provide a detector for flow rate and pressure of gas capable of detecting the flow rate and pressure of the gas. SOLUTION: A cylinder 7 is air-tightly and slidably engaged with a gas passage 5 of a device body 2. A first coil spring 8 for regulating movement of the cylinder...

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Bibliographische Detailangaben
Hauptverfasser: SATO TADASHI, MOMOI KAZUMITSU, KOZAKURA YORITSUGU, SAITO DAISUKE, IWAKATA MARIO, MIDORIKAWA AKIO, TOKIYA NAOKI, ISHIWATARI TADANAO, TAKAHASHI KAZUMA, MIYAKI SEIJI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a detector for flow rate and pressure of gas capable of detecting the flow rate and pressure of the gas. SOLUTION: A cylinder 7 is air-tightly and slidably engaged with a gas passage 5 of a device body 2. A first coil spring 8 for regulating movement of the cylinder 7 to the downstream side with a predetermined magnitude of biasing force is disposed between the device body 2 and the cylinder 7. A valve element 9 is disposed movably inside the cylinder 7. A second coil spring 10 for regulating, with a predetermined magnitude of biasing force, movement of the valve element 9 to the downstream side and seating of it on a valve seat member 13 is disposed between the cylinder 7 and the valve element 9. A first preventing member 14 for preventing the cylinder 7 from moving to the downstream side is screwed and fixed to the device body 1. A second preventing member 15 for preventing the valve element 9 from moving to the downstream side is screwed and fixed to a screw hole 14a of the first preventing member 14. COPYRIGHT: (C)2006,JPO&NCIPI