SUPER FINISHING DEVICE

PROBLEM TO BE SOLVED: To provide a super finishing device designed to be easy in realizing high-speed processing and changing the oscillation angle and oscillation standard angle even during processing. SOLUTION: In this super finishing device, a servo motor is composed of a servo motor rotor 6, fixed to an oscillation axis 5 to which a grinding stone 1 is attached; a servo motor stator 18, countering the servo motor rotor 6; and an encoder 11. Because the oscillating axis 5 is directly oscillated by means of the servo motor, no conventional vibration due to crank occurs, so that the realization of higher-speed operation and increased precision is possible. Also, the aforementioned servo motor can continually alter the oscillation angle, oscillation standard angle, and oscillation speed even during operation due to control equipment arranged to control a driving device for driving the servo motor. Accordingly, it is possible to set more universal and optimal processing conditions. COPYRIGHT: (C)2006,JPO&NCIPI