SCANNING ELECTRON MICROSCOPE

PROBLEM TO BE SOLVED: To provide a scanning electron microscope capable of providing a high-resolution image even if a sample is tilted when a surface of the sample is observed by a retarding method for applying a negative voltage to the sample. SOLUTION: This scanning electron microscope is so structured that an insulation member 5d is arranged between an inner magnetic pole 5a and an outer magnetic pole 5b; and the inner magnetic pole 5a and the outer magnetic pole 5b are electrically insulated from each other. The sample 6 is mounted on a sample base 7 by being provided with electrical continuity; and the sample base 7 is mounted on a sample stage 8 by being electrically insulated from the sample stage 8. When a negative voltage is applied to the sample base 7 and the outer magnetic pole 5b by a power source 9, the sample base 7, the sample 6 and the outer magnetic pole 5b are set at the same potential; and the symmetry of an electric field with respect to the optical axis of an electron beam is kept even if the sample is tilted. Thereby, a high-resolution image can be observed even in an observation condition of a low-acceleration voltage with a simple structure and without carrying out complicated control. COPYRIGHT: (C)2006,JPO&NCIPI