CYLINDER PRESSURE SENSOR USING AL-SUBSTITUTED LGS SINGLE CRYSTAL AS PIEZOELECTRIC ELEMENT
PROBLEM TO BE SOLVED: To provide a small-sized inexpensive cylinder pressure sensor of simple structure capable of dispensing with a cooler. SOLUTION: The problem is solved by using, as a piezoelectric element, any of LGAS, LNGA and LTGA wherein Ga (gallium) is substituted with Al (aluminum) to redu...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a small-sized inexpensive cylinder pressure sensor of simple structure capable of dispensing with a cooler. SOLUTION: The problem is solved by using, as a piezoelectric element, any of LGAS, LNGA and LTGA wherein Ga (gallium) is substituted with Al (aluminum) to reduce an amount of the Ga, and a change of a specific resistance value of the crystal is kept within 1011Ω even at 500 °C or more. For example, Ga5is substituted with Ga4.8and Al0.2to form La3Ga4.8Al0.2SiO14, and the amount of the Ga is reduced thereby, in the single crystal of the LGAS. COPYRIGHT: (C)2006,JPO&NCIPI |
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