ACCELERATION SENSOR

PROBLEM TO BE SOLVED: To achieve high sensitivity and high accuracy of a capacitance-type acceleration sensor by reducing distortion of a sensor chip due to external stress such as package deformations etc. SOLUTION: A movable electrode; a fixed electrode; and a beam making a movable electrode part movable are formed by machining a semiconductor substrate in a sensor chip 2. The sensor chip 2 is sealed between an upper glass 3 from above and a glass seating 4 from below, and the back surface of the glass seating 4 includes a counter bore 5 except at least part of an outer circumferential part. The chip 2 is joined to the bottom surface 11 of a recession-type package 10 at the remaining part of the outer circumferential part with an adhesive 7 to make the counter bore 5 to absorb stress to the censor chip 2 from the outside. COPYRIGHT: (C)2006,JPO&NCIPI