MANUFACTURING METHOD AND TRANSFER METHOD FOR THIN-FILM PIEZOELECTRIC BODY ELEMENT

PROBLEM TO BE SOLVED: To provide a manufacturing method and a transferring method for an inexpensive thin-film piezoelectric body element having high piezoelectric properties and reliability. SOLUTION: The method comprises a process for forming a laminated film having a sacrifice layer thin film 2, a first metal thin film 3, a piezoelectric body thin film 4, and a second metal thin film 5 on one surface of a light-transmitting substrate 1 for film formation; a process for processing the laminated film to form a piezoelectric body element pattern comprising the first and second metal thin films 3, 5 and the piezoelectric body thin film 4 on the sacrifice layer thin film 2; and a process for irradiating the sacrifice layer thin film 2 with a laser beam having an irradiation area including the piezoelectric body element pattern from the other surface side of the substrate 1 for film formation, and allowing separation reaction to occur at the part of the sacrifice layer thin film 2 to separate the piezoelectric element pattern from the substrate 1 for film formation. COPYRIGHT: (C)2006,JPO&NCIPI