OPTICAL WAVEGUIDE FORMATION SUBSTRATE

PROBLEM TO BE SOLVED: To provide an optical waveguide formation substrate which has a high flexibility of design with respect to an application object range, a circuit constitution, etc. and is easy to manufacture. SOLUTION: The optical waveguide formation substrate 17 has hard portions 171 and 173...

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Hauptverfasser: NAGAKI KOJI, FUJIWARA MAKOTO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide an optical waveguide formation substrate which has a high flexibility of design with respect to an application object range, a circuit constitution, etc. and is easy to manufacture. SOLUTION: The optical waveguide formation substrate 17 has hard portions 171 and 173 having hard substrates 2 and 12 and a flexible portion 175 which is placed between them and can be deformed by bending, when viewed in the surface direction. An element 1 comprising a light emitting element or a light receiving element is installed in the hard portion 171. The flexible portion 175 is obtained by removing unnecessary parts 23 and 123 being a part of the substrates 2 and 12, from the substrates 2 and 12. An optical waveguide 9 is formed over the hard portion 171, the flexible portion 175, and the hard portion 173. The optical waveguide 9 is formed by layering a clad layer 91, a core layer 93, and a clad layer 97 in this order, and a core portion 94 and a clad portion 95 different in refractive index are formed in the core layer 93. COPYRIGHT: (C)2006,JPO&NCIPI