METHOD AND DEVICE FOR INSPECTING COLOR UNEVENNESS

PROBLEM TO BE SOLVED: To precisely inspect the presence degree of color unevenness without receiving the effect of an individual difference and the state difference of an individual. SOLUTION: The focus of a condensing optical system 34 is regulated so as to remove a moire to take the image of a sub...

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Hauptverfasser: TAJIMA HISAYASU, KOYAMA YASUSHI
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creator TAJIMA HISAYASU
KOYAMA YASUSHI
description PROBLEM TO BE SOLVED: To precisely inspect the presence degree of color unevenness without receiving the effect of an individual difference and the state difference of an individual. SOLUTION: The focus of a condensing optical system 34 is regulated so as to remove a moire to take the image of a substrate 31 by an imaging device 35 and the presence degree of the color unevenness or the like is inspected on the basis of imaging data. COPYRIGHT: (C)2006,JPO&NCIPI
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
TESTING
TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES
TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
title METHOD AND DEVICE FOR INSPECTING COLOR UNEVENNESS
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