METHOD AND DEVICE FOR INSPECTING COLOR UNEVENNESS

PROBLEM TO BE SOLVED: To precisely inspect the presence degree of color unevenness without receiving the effect of an individual difference and the state difference of an individual. SOLUTION: The focus of a condensing optical system 34 is regulated so as to remove a moire to take the image of a sub...

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Hauptverfasser:	TAJIMA HISAYASU, KOYAMA YASUSHI
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To precisely inspect the presence degree of color unevenness without receiving the effect of an individual difference and the state difference of an individual. SOLUTION: The focus of a condensing optical system 34 is regulated so as to remove a moire to take the image of a substrate 31 by an imaging device 35 and the presence degree of the color unevenness or the like is inspected on the basis of imaging data. COPYRIGHT: (C)2006,JPO&NCIPI