METHOD AND APPARATUS FOR MANUFACTURING MICROCHIP AND MICROCHIP

PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing a microchip by which high joining strength and an excellent sealing property are attained and joining time is shortened, and the microchip manufactured at a low cost by the manufacturing method and having small deformation....

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Bibliographische Detailangaben
Hauptverfasser:	TORIMURA MASAMOTO, UCHIDA KATSUHIDE, OSANAWA RYUICHI
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMISTRY GLASS INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES JOINING GLASS TO GLASS OR OTHER MATERIALS MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES MEASURING METALLURGY MINERAL OR SLAG WOOL PHYSICS SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing a microchip by which high joining strength and an excellent sealing property are attained and joining time is shortened, and the microchip manufactured at a low cost by the manufacturing method and having small deformation. SOLUTION: The microchip manufacturing method having a joining step for joining a fine channel-formed substrate to a glass substrate has a step for allowing a heating apparatus to face the substrate and the glass substrate by moving the heating apparatus using a light source as heat source radiation or the superimposed substrate and the glass substrate in the XY-axial direction and the joining step for irradiating a joining part between the substrate and the glass substrate with the heat source radiation from the heating apparatus to form a joining line on both sides of the fine channel. COPYRIGHT: (C)2006,JPO&NCIPI