ACCELERATION SENSOR

PROBLEM TO BE SOLVED: To provide an acceleration sensor capable of forming an opening facing an electrode section, for example, in a second substrate while suppressing increase in size of the whole acceleration sensor. SOLUTION: The acceleration sensor comprises a first substrate 1, the multilayer s...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KATAHARA YUTAKA, FUKAURA TERUYA, SHIBATA SEIJI, KATSUKI SHINICHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING
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