ACCELERATION SENSOR

PROBLEM TO BE SOLVED: To provide an acceleration sensor capable of forming an opening facing an electrode section, for example, in a second substrate while suppressing increase in size of the whole acceleration sensor. SOLUTION: The acceleration sensor comprises a first substrate 1, the multilayer s...

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Bibliographische Detailangaben
Hauptverfasser:	KATAHARA YUTAKA, FUKAURA TERUYA, SHIBATA SEIJI, KATSUKI SHINICHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an acceleration sensor capable of forming an opening facing an electrode section, for example, in a second substrate while suppressing increase in size of the whole acceleration sensor. SOLUTION: The acceleration sensor comprises a first substrate 1, the multilayer second substrate 2, and a sensor section. The multilayer second substrate 2 is arranged so as to face the first substrate 1, has the opening 2a for electrode extraction, and is formed of a plurality of layers. The sensor section (movable mass body 4 and fixed electrode 5) is arranged in a sealed cavity section 3 formed between the facing first substrate 1 and multilayer second substrate 2. COPYRIGHT: (C)2006,JPO&NCIPI