CASSETTE ADAPTOR

PROBLEM TO BE SOLVED: To provide a cassette adaptor in which the risk of an operator being injured by touching the component of semiconductor wafer processing equipment can be avoided when a cassette adaptor is used. SOLUTION: The cassette adaptor 10 being installed removably on the cassette mountin...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	MIZOMOTO YASUTAKA, YOSHIDA NORIYUKI, SATO KICHIZO, IZUMIDA MASANORI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a cassette adaptor in which the risk of an operator being injured by touching the component of semiconductor wafer processing equipment can be avoided when a cassette adaptor is used. SOLUTION: The cassette adaptor 10 being installed removably on the cassette mounting stand of semiconductor wafer processing equipment comprising the cassette mounting stand for mounting a cassette C containing one or more semiconductor wafers, and a means 30 for carrying in or carrying out the semiconductor wafer mounted in the cassette C is further provided with a base mount 110 for mounting the cassette C, and a protective cover 120 arranged on the base mount 110 to cover the periphery of the cassette C such that carrying passage side of the semiconductor wafer by the carrying means 30 is opened. COPYRIGHT: (C)2006,JPO&NCIPI