MANUFACTURING METHOD OF PHASE LEVEL DIFFERENCE ELEMENT
PROBLEM TO BE SOLVED: To provide a manufacturing method of a phase level difference element which can suppress lowering of optical efficiency. SOLUTION: As an engineering method for directly forming the phase level difference element of a blaze shape or the like on a substrate 1, an AR coat layer 5...
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Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a manufacturing method of a phase level difference element which can suppress lowering of optical efficiency. SOLUTION: As an engineering method for directly forming the phase level difference element of a blaze shape or the like on a substrate 1, an AR coat layer 5 is deposited on the substrate 1 and then a level difference is formed by multilayer vapor deposition of vapor deposition films 2, 3, 4 of high refractive index. By this constitution, the phase level difference element has an AR coat characteristic. COPYRIGHT: (C)2006,JPO&NCIPI |
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