FILM THICKNESS MEASUREMENT METHOD AND FILM THICKNESS MEASUREMENT PROGRAM
PROBLEM TO BE SOLVED: To provide a film thickness measurement method and a film thickness measurement program for accurately finding a film thickness value in view of the effect of an inclination of a film surface and the thickness of a substrate, and not presupposing that the refractive index of th...
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| creator | FUJIWARA YUTAKA NAKAKUKI HIDEKI |
| description | PROBLEM TO BE SOLVED: To provide a film thickness measurement method and a film thickness measurement program for accurately finding a film thickness value in view of the effect of an inclination of a film surface and the thickness of a substrate, and not presupposing that the refractive index of the film is already-known. SOLUTION: A spectral reflectivity model is prepared in view of the effect of the inclination of the film surface and the thickness of the substrate to perform a comparison operation of this model with measured spectral reflectivity, thereby accurately finding the film thickness value. First-stage and second-stage theoretical curves of reflectivity are prepared from a wavelength dispersion expression model of a refractive index. A film thickness value, which minimizes the mean square error between the second-stage theoretical curve and data on the measured spectral reflectivity, is used as a measurement result on a film thickness to be found. COPYRIGHT: (C)2006,JPO&NCIPI |
| format | Patent |
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SOLUTION: A spectral reflectivity model is prepared in view of the effect of the inclination of the film surface and the thickness of the substrate to perform a comparison operation of this model with measured spectral reflectivity, thereby accurately finding the film thickness value. First-stage and second-stage theoretical curves of reflectivity are prepared from a wavelength dispersion expression model of a refractive index. A film thickness value, which minimizes the mean square error between the second-stage theoretical curve and data on the measured spectral reflectivity, is used as a measurement result on a film thickness to be found. 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SOLUTION: A spectral reflectivity model is prepared in view of the effect of the inclination of the film surface and the thickness of the substrate to perform a comparison operation of this model with measured spectral reflectivity, thereby accurately finding the film thickness value. First-stage and second-stage theoretical curves of reflectivity are prepared from a wavelength dispersion expression model of a refractive index. A film thickness value, which minimizes the mean square error between the second-stage theoretical curve and data on the measured spectral reflectivity, is used as a measurement result on a film thickness to be found. 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SOLUTION: A spectral reflectivity model is prepared in view of the effect of the inclination of the film surface and the thickness of the substrate to perform a comparison operation of this model with measured spectral reflectivity, thereby accurately finding the film thickness value. First-stage and second-stage theoretical curves of reflectivity are prepared from a wavelength dispersion expression model of a refractive index. A film thickness value, which minimizes the mean square error between the second-stage theoretical curve and data on the measured spectral reflectivity, is used as a measurement result on a film thickness to be found. COPYRIGHT: (C)2006,JPO&NCIPI</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TESTING |
| title | FILM THICKNESS MEASUREMENT METHOD AND FILM THICKNESS MEASUREMENT PROGRAM |
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