APPARATUS FOR PROCESSING SUBSTRATE

PROBLEM TO BE SOLVED: To provide a processing apparatus for forming thin layers on a substrate used for an organic light emitting diode. SOLUTION: The apparatus includes each process chamber comprising a mask attaching chamber, a deposition chamber and a mask detaching chamber. The mask attaching chamber, the deposition chamber and the mask detaching chamber are provided, on each upper part, with a transferring guide installed thereinside, and a substrate supporter for supporting a substance horizontally moves along the transferring guide in the deposition chamber while the process is performed and the substrate is moved between the process chambers. Thus, a time for processing the substrate and an area for the apparatus may be reduced. Also, the chambers are grouped in one or more, and a gate valve is installed between the grouped chambers for opening and closing a path between the grouped chambers to allow inner portions to be separated from each other. Accordingly, the chambers may be continuously maintained in a vacuum state when any one of the chambers is repaired. COPYRIGHT: (C)2006,JPO&NCIPI