APPARATUS FOR DEPOSITING THIN FILM ON SHEET, AND METHOD FOR MANUFACTURING SHEET WITH THIN FILM

PROBLEM TO BE SOLVED: To provide a thin film deposition apparatus and a method for manufacturing a sheet with a thin film capable of realizing slight effect of pinholes generated in a thin film deposition step of an electric-insulating sheet, in particular, a plastic film, and realizing slight effec...

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Bibliographische Detailangaben
Hauptverfasser:	TSUTSUMIDA YUJI, SATO MAKOTO
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a thin film deposition apparatus and a method for manufacturing a sheet with a thin film capable of realizing slight effect of pinholes generated in a thin film deposition step of an electric-insulating sheet, in particular, a plastic film, and realizing slight effect of the thermal deformation and of wrinkles of a non-vapor-deposited part. SOLUTION: In the method for manufacturing the sheet with the thin film in which the thin film is deposited by depositing particles flying from a particle generation source on an electric-insulating sheet to be conveyed along a circumferential surface of a rotating cylindrical sheet guide face, the voltage is applied between the sheet guide face and the thin film deposited on the sheet via a resistor connected in series therebetween, and the resistance is reduced immediately after detecting that pinholes are made in the sheet. COPYRIGHT: (C)2006,JPO&NCIPI