METHOD FOR MANUFACTURING ACTIVE MATRIX SUBSTRATE, ACTIVE MATRIX SUBSTRATE, ELECTRO-OPTIC DEVICE, AND ELECTRONIC APPLIANCE
PROBLEM TO BE SOLVED: To provide a method for manufacturing an active matrix substrate for reducing the number of steps where a dry process and photolithographic etching are combined. SOLUTION: The method includes: a first step of forming lines 40, 42, 46 in a lattice pattern where the line 42 in ei...
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