METHOD AND DEVICE FOR INSPECTING SUBSTRATE FOR USE IN PLASMA DISPLAY PANEL

PROBLEM TO BE SOLVED: To provide an inspection method and device capable of detecting a shape defect in a barrier rib of a PDP and capable of determining quality thereof, with high precision, in a short time. SOLUTION: In the method for inspecting a shape of the barrier rib 10 formed in a substrate 21 for a plasma display panel, illumination light is emitted from a barrier rib forming face side of the substrate 21 for the plasma display panel to irradiate the one barrier rib 10 out of the plurality of barrier ribs 10 arrayed in parallel, with the illumination light, reflected light from the barrier rib 10 therein is imaged, and an image data obtained by the imaging is image-processed to determine the presence of the defect in the barrier rib 10. COPYRIGHT: (C)2006,JPO&NCIPI