TOTAL REFLECTION MEASURING INSTRUMENT

PROBLEM TO BE SOLVED: To provide a total reflection measuring instrument capable of measuring two-dimensional mapping at a high speed with high precision even if a single element detector or a linear array detector is used. SOLUTION: The total reflection measuring instrument 10 is constituted so as to condense light to the contact surface of a sample with an ATR prism 14 at an incident angle more than a critical angle to measure the total reflection light from the contact surface and equipped with a light irradiation means 12 for emitting the light condensed to the contact surface, a light detecting means 18 for detecting the total reflection light from the contact surface, an aperture 20 for restricting the light detected by the light detecting means only to the light from the specific region within the contact surface and the scanning mirror 22 on a detection side provided on the light path reaching the aperture 20 from the ATR prism 14. The scanning mirror 22 on the detection side is constituted so as to alter the direction of a reflecting surface and the measuring region in the contact surface measured by the light detecting means 18 is altered by altering the reflecting surface of the scanning mirror 22 on the detection side with respect to the total reflection light from the contact surface to perform mapping measurement. COPYRIGHT: (C)2006,JPO&NCIPI