METHOD FOR CALIBRATING WAVELENGTH OF OPTICAL MEASURING SYSTEM

PROBLEM TO BE SOLVED: To improve match of data calculated by a polarizing analysis device and a spectrophotometer with a measured value. SOLUTION: An optical measuring system having the polarizing analysis device and the spectrophotometer is calibrated, and the polarizing analysis device and the spe...

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1. Verfasser: IFFLAND THOMAS
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To improve match of data calculated by a polarizing analysis device and a spectrophotometer with a measured value. SOLUTION: An optical measuring system having the polarizing analysis device and the spectrophotometer is calibrated, and the polarizing analysis device and the spectrophotometer are firstly calibrated independently. Then, thickness (dphoto) of the spectrophotometer of a sample is determined with an initial incident angle (θinit) using the spectrophotometer. Then, thickness (delli) of the polarizing analysis device of the sample is determined using the polarizing analysis device. Until the absolute value of the difference between the thickness (dphoto) of the spectrophotometer and the thickness (delli) of the polarizing analysis device becomes smaller than a predetermined absolute value, the spectrophotometer is matched with the polarizing analysis device by changing the initial incident angle (θinit). COPYRIGHT: (C)2006,JPO&NCIPI