TRAY TRANSFER DEVICE

PROBLEM TO BE SOLVED: To provide a tray transfer device capable of transferring a vertically transferred tray stably and speedily, and capable of detecting the approach and discharge of the tray. SOLUTION: The transfer device 100 comprises a transfer section and a detection section. At the transfer...

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Hauptverfasser: HWANG MIN JEONG, JUNG SUNG WHA
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creator HWANG MIN JEONG
JUNG SUNG WHA
description PROBLEM TO BE SOLVED: To provide a tray transfer device capable of transferring a vertically transferred tray stably and speedily, and capable of detecting the approach and discharge of the tray. SOLUTION: The transfer device 100 comprises a transfer section and a detection section. At the transfer section, a transfer path is formed while adhering to the lower portion of the tray to transfer the vertical tray 112 in which a substrate and a mask are fixed and a rod-like contact member is installed at a lower end, and a plurality of pulleys 114 rotated by a drive source are provided. At the detection section, a sensor is provided on the transfer path of the tray 112, and the approach and discharge of the tray 112 can be detected. COPYRIGHT: (C)2006,JPO&NCIPI
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subjects BASIC ELECTRIC ELEMENTS
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
CONVEYING
DIFFUSION TREATMENT OF METALLIC MATERIAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
title TRAY TRANSFER DEVICE
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