TRAY TRANSFER DEVICE

PROBLEM TO BE SOLVED: To provide a tray transfer device capable of transferring a vertically transferred tray stably and speedily, and capable of detecting the approach and discharge of the tray. SOLUTION: The transfer device 100 comprises a transfer section and a detection section. At the transfer...

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Bibliographische Detailangaben
Hauptverfasser:	HWANG MIN JEONG, JUNG SUNG WHA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONVEYING DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a tray transfer device capable of transferring a vertically transferred tray stably and speedily, and capable of detecting the approach and discharge of the tray. SOLUTION: The transfer device 100 comprises a transfer section and a detection section. At the transfer section, a transfer path is formed while adhering to the lower portion of the tray to transfer the vertical tray 112 in which a substrate and a mask are fixed and a rod-like contact member is installed at a lower end, and a plurality of pulleys 114 rotated by a drive source are provided. At the detection section, a sensor is provided on the transfer path of the tray 112, and the approach and discharge of the tray 112 can be detected. COPYRIGHT: (C)2006,JPO&NCIPI