METHOD OF MANUFACTURING ELECTRON EMISSION DEVICE

PROBLEM TO BE SOLVED: To provide an electron emission device capable of emitting electron with high efficiency. SOLUTION: The electron emission device 10 has a lower electrode 12, an emitter part 13 made of a dielectric, and an upper electrode 14 having through-holes 14a. Electron is emitted from the emitter part through the upper electrode by impression of a driving voltage between the lower electrode and the upper electrode. An average diameter of the through-hole 14a is not less than 10 nm and less than 100 nm. By the above, plenty of electron can be stored just under the respective through-holes 14a, and further, more through-holes 14a can be formed on the upper electrode 14. COPYRIGHT: (C)2006,JPO&NCIPI