SENSOR ASSEMBLY, DIGITAL SERIAL BUS AND PROTOCOL, SENSOR NETWORK, AND LITHOGRAPHY DEVICE AND SYSTEM

PROBLEM TO BE SOLVED: To provide a system and a method that transfer data in a lithography device. SOLUTION: A sensor assembly as an embodiment includes a sensor, an analog-digital converter which is configured to digitize a data signal received from the sensor, and an array of logic elements config...

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Bibliographische Detailangaben
Hauptverfasser:	PALM ADRIANUS JOHANNES, TILLIE FRANSISCUS ANTONIUS J, GIJSBERTSE RONALD, VREEDE OLAF THEO JOS
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a system and a method that transfer data in a lithography device. SOLUTION: A sensor assembly as an embodiment includes a sensor, an analog-digital converter which is configured to digitize a data signal received from the sensor, and an array of logic elements configured to receive data of 1st data transfer on a serial bus and transfer data of 2nd data transfer including information in the signal digitized on the serial bus. The array of logic elements transfers data of the 2nd data transfer according to information received by the 1st data transfer. COPYRIGHT: (C)2006,JPO&NCIPI