CALIBRATION METHOD FOR MEASURING INSTRUMENT

PROBLEM TO BE SOLVED: To solve a problem wherein an edge portion is formed into a tapered shape to make reflected light not get incident into an objective lens but go out to an outside when an edge part is irradiated with light, in such a film pattern of a mask as a standard scale (mask) for calibration in reflection illumination forms the prescribed film pattern on a transparent glass substrate such as chromium incapable of transmitting illumination light, and a problem wherein a taper-shaped portion of the edge part is not discriminated from an absence portion of the film pattern not to allow width measurement including an edge and not to allow accurate calibration, because the light is transmitted in a portion of no film pattern to make the reflected light not get incident into the objective lens. SOLUTION: After the prescribed pattern is formed in the transparent glass substrate, the mask formed with a reflecting material is prepared to cover the whole transparent glass substrate, and the calibration in the reflection illumination is carried out using the mask. COPYRIGHT: (C)2006,JPO&NCIPI