SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

PROBLEM TO BE SOLVED: To provide a semiconductor device capable of reducing a resistance of a pillar layer. SOLUTION: The semiconductor device includes: a first-conductivity type semiconductor substrate 1; a pillar structure section formed on the first-conductivity type semiconductor substrate, the...

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Hauptverfasser: TOKANO KENICHI, KOZUKI SHIGEO, KOBAYASHI HITOSHI, AIDA SATOSHI, TAJI SATOSHI, OKUMURA HIDEKI, IZUMISAWA MASARU, TSUCHIYA MASANOBU
Format: Patent
Sprache:eng
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