DIAPHRAGM FOR FLUID CONTROLLER AND VALVE DEVICE USING THE SAME

PROBLEM TO BE SOLVED: To enable a valve arrangement to enhance productivity by enhancing assembled workability and yield in addition to superior durability. SOLUTION: The valve device is configured so as to compose a diaphragm (18) by superimposing a plurality of shin sheets (33) made of metal with each other. The diaphragm is configured so as to integrally form a coating layer (34) comprising a fluorocarbon resin on one side of mutual opposed face of the shin sheets (33) made of the metal which superimposes with each other by thickness of 2-50μm. The valve device configured so as to form an attachment hole (14) of a closed valve in a housing (2) of the valve device (1) and to form a working chamber (15) and a closed valve chamber (10) in the attachment hole (14) of the closed valve in order by directing inwardly from outside. The valve device is configured so as to densely partition the closed valve chamber (10) from the working chamber (15) by attaching the diaphragm (18) on the attachment hole (14) of the closed valve. COPYRIGHT: (C)2006,JPO&NCIPI