COVER GLASS FOR SOLID IMAGING DEVICE, AND ITS MANUFACTURING METHOD
PROBLEM TO BE SOLVED: To provide cover glass for a solid imaging device of a high cleanliness factor having high mechanical strength and stable chemical performance, whose thin film arranged on the surface of the cover glass is not easily peeled, so that the cover glass may have high performance as...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide cover glass for a solid imaging device of a high cleanliness factor having high mechanical strength and stable chemical performance, whose thin film arranged on the surface of the cover glass is not easily peeled, so that the cover glass may have high performance as being used for the window material of the solid imaging device. SOLUTION: The cover glass 10 for the solid imaging device has a primary translucent surface 11a and a secondary translucent surface 11b on the front and rear in the direction of the plate thickness of plate glass made of inorganic oxide glass. A thin film 20 is formed on the primary translucent surface 11a, and irregularity is formed at the end edge 22 of the thin film 20 located at an outer edge on the primary translucent surface 11a of the plate glass. The projection dimension L of the irregularity from a maximum hollow position to a maximum projection position on the primary translucent surface 11a and its parallel surface is in a range of 0.5 μm to 50 μm. In addition, the manufacturing method comprises a process to melt raw materials for the glass in a heat-resistant vessel, a process to form the obtained molten glass into the plate glass, a process to form a thin film on the plate glass, and a process to divide the plate glass with the thin film into small pieces of glass. COPYRIGHT: (C)2006,JPO&NCIPI |
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