GAS COMPONENT ANALYZER

PROBLEM TO BE SOLVED: To accurately and continuously measure a sample gas containing a mixture of a plurality of components different in molecular weight or viscosity. SOLUTION: This gas component analyzer is equipped with a sample gas introducing part 1 for introducing the sample gas G, the mass analyzer 3 connected to the sample gas introducing part 1 through an throttle 2, the exhaust system 4 connected to the mass analyzer 3, a pressure gauge 5 for detecting the pressure on the downstream side of the throttle 2 and a data processing part 6 for correcting the analytic result of the sample gas G obtained by the mass analyzer 3 using the pressure detected by the pressure gauge 5 to calculate the concentrations of the components of the sample gas G on the basis of the analytic result after correction. By this constitution, the respective components can be continuously analyzed without impairing the measurement precision of the sample gas G even if the mixture ratio of the respective components in the sample gas G, containing a mixture of a plurality of the components different in molecular weight or viscosity, is varied. COPYRIGHT: (C)2006,JPO&NCIPI