COMPOSITE MICROSCOPE

PROBLEM TO BE SOLVED: To enable further broad analysis of a sample. SOLUTION: An LSM image and an SPM image are stored in an iamge information memory 22a by a CPU 18 in conformity with XY coordinates on a sample 5, and Z-coordinate position information Dz of the SMP image is stored in a height infor...

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Bibliographische Detailangaben
1. Verfasser:	FUJIMOTO HIROHISA
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To enable further broad analysis of a sample. SOLUTION: An LSM image and an SPM image are stored in an iamge information memory 22a by a CPU 18 in conformity with XY coordinates on a sample 5, and Z-coordinate position information Dz of the SMP image is stored in a height information memory 22b by the CPU 18. The Z-coordinate position information Dz of the SPM image is read from the height information memory 22b by the CPU 18, and luminance information Dp contained in the LSM image stored in the image information memory 22a is extracted. The Z-coordinate position information Dz and the luminance information Dp are combined together to form three-dimensional image information of the sample 5, and the information is displayed on a display part 23. COPYRIGHT: (C)2006,JPO&NCIPI