INSPECTION DEVICE AND METHOD OF TFT

PROBLEM TO BE SOLVED: To inspect electric characteristics of a TFT having an open and exposed source electrode or drain electrode by use of a noncontact current source without bad influence (contamination, breakage, etc.) on the TFT. SOLUTION: The inspection device 100 of a TFT array substrate 14 comprises ion flow feeders 16 and 18 for supplying an ion flow to the surface of the substrate 14 having an array 12 of TFT to be connected to an electrode either whose source or drain is open and exposed, a control circuit 24 for supplying an operating voltage to a gate electrode of a TFT to be inspected in the array, and a measuring circuit 24 measuring an operating current through the source or drain which is not open of the TFT to be inspected. COPYRIGHT: (C)2006,JPO&NCIPI