METHOD FOR MANUFACTURING CARBON NANOTUBE OR CARBON NANOFIBER AND METHOD FOR FORMING NANO-STRUCTURE

PROBLEM TO BE SOLVED: To provide a carbon nanotube, a carbon nanofiber and a conical, pyramidal, acicular, columnar or the like projection (nano-structure) which are capable of being manufactured with high reproducibility while controlling selective growth and number density by low current ion irrad...

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Bibliographische Detailangaben
Hauptverfasser: OTA AKIRA, TANEMURA MASAYUKI, KITAZAWA MASASHI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a carbon nanotube, a carbon nanofiber and a conical, pyramidal, acicular, columnar or the like projection (nano-structure) which are capable of being manufactured with high reproducibility while controlling selective growth and number density by low current ion irradiation. SOLUTION: A piece of the carbon nanotube or the carbon nanofiber is grown selectively only on the projecting apex on a substrate by irradiating a soot like carbon film formed on the substrate with ion beam in a vacuum chamber. COPYRIGHT: (C)2006,JPO&NCIPI