DEVICE AND COLUMN FOR TEST PIECE INSPECTION

DEVICE AND COLUMN FOR TEST PIECE INSPECTION

PROBLEM TO BE SOLVED: To provide a device and a column for test piece inspection. SOLUTION: The device can make it possible to have access to a large amount of additional information of a test piece compared with a single flat face test piece image by providing one or more test piece images formed b...

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Bibliographische Detailangaben
Hauptverfasser: HAAS NADAV, GOLDENSHTEIN ALEX, ADAMEC PAVEL, GOLD YARON I, BEN-AV RADEL, PEARL ASHER, PETROV IGOR
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a device and a column for test piece inspection. SOLUTION: The device can make it possible to have access to a large amount of additional information of a test piece compared with a single flat face test piece image by providing one or more test piece images formed by different visual angles. By inclining the beams between two images and by moving the test piece to a new position, the visual angle (incident angle) is changed. Thereby, displacement of beams due to inclination of the beams are compensated. Therefore, the beams basically scan a second image while displaying and recording for the same region in which a first image is scanned while displaying and recording. COPYRIGHT: (C)2006,JPO&NCIPI