FORMING METHOD AND SYSTEM OF EMITTER
PROBLEM TO BE SOLVED: To provide a forming method and a system of an electron gun emitter which can perform forming of build-up of emitter automatically in the device used incorporating the emitter finally. SOLUTION: The system is constructed of an electron gun 13 having an emitter 13a, an electron...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a forming method and a system of an electron gun emitter which can perform forming of build-up of emitter automatically in the device used incorporating the emitter finally. SOLUTION: The system is constructed of an electron gun 13 having an emitter 13a, an electron gun control circuit 27 which applies a prescribed heating treatment and/or voltage impressing treatment to the emitter 13a, a screen 20 which is provided in the vicinity of the exit of electrons of the emitter 13a, screen observation windows 21, 22 which can observe the screen 20 from the outside, a pattern observation camera 23 which observes the state of the screen 20 from the observation window, and a computer 25 which obtains the emission pattern by taking in the output of the pattern observation camera 23, and by comparing with a prescribed reference pattern by pattern recognition, gives a control signal to the electron gun control circuit 27 according to the comparison result. COPYRIGHT: (C)2006,JPO&NCIPI |
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