PRODUCTION OF POLYMER-COATED PARTICLE FOR CHEMICAL MECHANICAL POLISHING

PROBLEM TO BE SOLVED: To produce a polymer-coated particles useful for carrying out chemical mechanical polishing of magnetic, optical, semiconductor or silicon substrates. SOLUTION: At first, a dispersion of particle cores in a non-aqueous solvent is prepared. Then, a polymeric precursor is introdu...

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Bibliographische Detailangaben
Hauptverfasser:	BARNEY NATHANIEL A, QUANCI JOHN, PARTCH RICHARD E, WANG HONGYU
Format:	Patent
Sprache:	eng
Schlagworte:	ADHESIVES BASIC ELECTRIC ELEMENTS CHEMISTRY COMPOSITIONS BASED THEREON DRESSING OR CONDITIONING OF ABRADING SURFACES DYES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS ORGANIC MACROMOLECULAR COMPOUNDS PAINTS PERFORMING OPERATIONS POLISHES POLISHING SEMICONDUCTOR DEVICES THEIR PREPARATION OR CHEMICAL WORKING-UP TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To produce a polymer-coated particles useful for carrying out chemical mechanical polishing of magnetic, optical, semiconductor or silicon substrates. SOLUTION: At first, a dispersion of particle cores in a non-aqueous solvent is prepared. Then, a polymeric precursor is introduced into the dispersion and the polymeric precursor is reacted with the dispersion to form a polymer. At least a portion of the surface of the particle cores is coated with the polymer to form the polymer-coated particles having a solid outer polymeric shell. A non-aqueous solvent is substituted with water to form an aqueous mixture containing the polymer-coated particles. Then, an aqueous chemical mechanical polishing formulation is formed by using the polymer-coated particles without drying the polymer-coated particles. COPYRIGHT: (C)2006,JPO&NCIPI