MESOPOROUS METAL OXIDE COMPLEX GLASS WAVEGUIDING LAYER SENSOR, ITS MANUFACTURING METHOD, AND GAS SENSOR USING IT

MESOPOROUS METAL OXIDE COMPLEX GLASS WAVEGUIDING LAYER SENSOR, ITS MANUFACTURING METHOD, AND GAS SENSOR USING IT

PROBLEM TO BE SOLVED: To provide a glass waveguiding layer sensor having increased sensitivity and improved selectivity, its manufacturing method, and its application. SOLUTION: In this mesoporous metal oxide complex glass waveguiding layer sensor and its manufacturing method, the surface of the tap...

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Hauptverfasser: HONMA ITARU, SHU GOCHIN, KI SHIMI
Format: Patent
Sprache:eng
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INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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creator HONMA ITARU
SHU GOCHIN
KI SHIMI
description PROBLEM TO BE SOLVED: To provide a glass waveguiding layer sensor having increased sensitivity and improved selectivity, its manufacturing method, and its application. SOLUTION: In this mesoporous metal oxide complex glass waveguiding layer sensor and its manufacturing method, the surface of the tapered film of high-index material installed on the surface layer of the glass waveguiding layer is covered with a mesoporous metal oxide thin film. The sensor is used for detecting one or more selected from VOC, NOx, CO2, ammonia, and environmental hormone. COPYRIGHT: (C)2006,JPO&NCIPI
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title MESOPOROUS METAL OXIDE COMPLEX GLASS WAVEGUIDING LAYER SENSOR, ITS MANUFACTURING METHOD, AND GAS SENSOR USING IT
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