MESOPOROUS METAL OXIDE COMPLEX GLASS WAVEGUIDING LAYER SENSOR, ITS MANUFACTURING METHOD, AND GAS SENSOR USING IT

MESOPOROUS METAL OXIDE COMPLEX GLASS WAVEGUIDING LAYER SENSOR, ITS MANUFACTURING METHOD, AND GAS SENSOR USING IT

PROBLEM TO BE SOLVED: To provide a glass waveguiding layer sensor having increased sensitivity and improved selectivity, its manufacturing method, and its application. SOLUTION: In this mesoporous metal oxide complex glass waveguiding layer sensor and its manufacturing method, the surface of the tap...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HONMA ITARU, SHU GOCHIN, KI SHIMI
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a glass waveguiding layer sensor having increased sensitivity and improved selectivity, its manufacturing method, and its application. SOLUTION: In this mesoporous metal oxide complex glass waveguiding layer sensor and its manufacturing method, the surface of the tapered film of high-index material installed on the surface layer of the glass waveguiding layer is covered with a mesoporous metal oxide thin film. The sensor is used for detecting one or more selected from VOC, NOx, CO2, ammonia, and environmental hormone. COPYRIGHT: (C)2006,JPO&NCIPI