PROBE UNIT

PROBLEM TO BE SOLVED: To miniaturize a probe block 24, and to improve exchange operability of a probe needle block 29 or the like. SOLUTION: This probe unit 21 is equipped with a probe base 23 fixed to the body side, the probe block 24 for supporting a probe needle 80 on an accurate position in the mounted state on the probe base 23. The probe block 24 is constituted of a suspension base 26 formed so as to have an approximately L-shaped side shape, and mounted on the lower side face of the probe base 23; a slide base 27 formed so as to have a cubic shape, and combined in a small shape by being interfitted into the L-shaped suspension base 26; and an FPC block 28 and the probe needle block 29 mounted on the lower side of the slide base 27. The probe needle block 29 is equipped with a mounting locking part 83 for mounting/dismounting the probe needle block 29 by interfitting a mounding/dismounting handle 85 and taking the mounding/dismounting handle 85. COPYRIGHT: (C)2006,JPO&NCIPI