METHOD OF MANUFACTURING COVER GLASS FOR SEMICONDUCTOR PACKAGE

PROBLEM TO BE SOLVED: To provide a method of manufacturing a cover glass for a semiconductor package by which the surface is easily polished and the increase of α-ray emission caused by the sticking of abrasive containing U or Th on the surface is prevented. SOLUTION: A glass chip having ≤0.01 c/cm2...

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Bibliographische Detailangaben
Hauptverfasser: SANBE SHUJI, YODOGAWA MASAHIRO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a method of manufacturing a cover glass for a semiconductor package by which the surface is easily polished and the increase of α-ray emission caused by the sticking of abrasive containing U or Th on the surface is prevented. SOLUTION: A glass chip having ≤0.01 c/cm2×hr α-ray emission is manufactured by polishing the surface of large-sized glass, removing the peripheral part thereof and chipping the inside part. COPYRIGHT: (C)2006,JPO&NCIPI