COATING LIQUID SUPPLY APPARATUS AND SLIT COAT TYPE COATING APPARATUS

PROBLEM TO BE SOLVED: To provide a coating liquid supply apparatus including working fluid actuating type diaphragm pump without mixing a work fluid operating chamber with air and allowing a slit coat type coating apparatus to be always stably operated. SOLUTION: In the above diaphragm pump 40, a cl...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: AWAKAWA HIDEO, YAMAGUCHI TAKASHI
Format: Patent
Sprache:eng
Schlagworte:
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